Standard

ISO/TS 22933:2022

Published

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Abstract

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

Document information

  • Standard from ISO
  • Published:
  • Edition: 1
  • Document type: TS
  • Pages
  • Publisher ISO
  • Distributor ISO
  • ICS 71.040.40
  • ISO TC ISO/TC 201/SC 6