Standard

IEC/TR 63258:2021

Mar 2021 Published

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Abstract

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

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Standard from IEC
Published: 22 March 2021
Edition: 1
Document type: TR
Pages
ISBN:

Publisher IEC
Distributor IEC
ICS 07.120
ISO TC ISO/TC 229

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IEC/TR 63258:2021

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