Standard

IEC/IEEE 62659:2015 ED1

Sep 2015 Published

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Language English

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Abstract

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

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Standard from IEC
Published: 30 September 2015
Edition: 1
Document type: IS
Pages
ISBN: 9782832229156

Publisher IEC
Distributor IEC
ICS 07.030
ICS 07.120
ICS 25.020
ISO TC TC 113

IEC/IEEE 62659:2015 ED1

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